405nm laser processing of thin SU-8 polymer film
This paper presents a comprehensive study on the effect of laser fluence on a negative tone thin film resist, SU-8, using an all-fibre 405 nm laser direct writing technique. 405 nm Gaussian beam is delivered on the spin-coated SU-8 thin film using single mode fibre, followed by subsequent chemical d...
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Elsevier
2016
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| பகà¯à®¤à®¿à®•ளà¯: | |
| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•லà¯: | http://dx.doi.org/10.1016/j.ijleo.2015.11.057 http://dx.doi.org/10.1016/j.ijleo.2015.11.057 |
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