Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films / Goh Boon Tong
This work is focused on the study of hydrogenated silicon (Si:H) thin films and nanostructures grown by layer-by-layer (LBL) deposition technique using a home-built radio-frequency (rf) plasma enhanced chemical vapour deposition (PECVD) system. The initial phase of this work involved preparation...
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