Hashim, A. M., & Kanji, Y. (2009). Heteroepitaxial growth of 3C-SiC on Si substrates by rapid thermal triode plasma CVD using dimethylsilane at low temperature. Penerbit UTM Press.
Chicago Style CitationHashim, Abdul Manaf, and Yasui Kanji. Heteroepitaxial Growth of 3C-SiC On Si Substrates By Rapid Thermal Triode Plasma CVD Using Dimethylsilane At Low Temperature. Penerbit UTM Press, 2009.
MLA CitationHashim, Abdul Manaf, and Yasui Kanji. Heteroepitaxial Growth of 3C-SiC On Si Substrates By Rapid Thermal Triode Plasma CVD Using Dimethylsilane At Low Temperature. Penerbit UTM Press, 2009.
Warning: These citations may not always be 100% accurate.