à®®à¯‡à®±à¯à®•à¯‹à®³à¯à®•à®³à¯ˆ à®ªà®¤à®¿à®µà¯†à®Ÿà¯

à®Žà®ªà®¿à®Ž à®•à¯à®±à®¿à®ªà¯à®ªà®¿à®£à¯ˆà®ªà¯à®ªà¯

Albert Alim, E., Ismail, A. K., & Omar, M. F. (2016). Effect of methane flow rate to SiC thin films morphology deposited by VHF-PECVD. ICAMN 2016.

à®šà®¿à®•à®¾à®•à¯‹ à®ªà®¾à®£à®¿à®¯à®¿à®²à®¾à®© à®®à¯‡à®±à¯à®•à¯‹à®³à¯à®•à®³à¯

Albert Alim, Emilly, Abd. Khamim Ismail, and Muhammad Firdaus Omar. Effect of Methane Flow Rate to SiC Thin Films Morphology Deposited By VHF-PECVD. ICAMN 2016, 2016.

à®Žà®®à¯à®Žà®²à¯à®Ž à®®à¯‡à®±à¯à®•à¯‹à®³à¯ à®•à®¾à®Ÿà¯à®Ÿà®¿

Albert Alim, Emilly, Abd. Khamim Ismail, and Muhammad Firdaus Omar. Effect of Methane Flow Rate to SiC Thin Films Morphology Deposited By VHF-PECVD. ICAMN 2016, 2016.

à®Žà®šà¯à®šà®°à®¿à®•à¯à®•à¯ˆ: à®‡à®¨à¯à®¤ à®®à¯‡à®±à¯à®•à¯‹à®³à¯à®•à®³à¯ à®Žà®ªà¯à®ªà¯‹à®¤à¯à®®à¯ 100% à®¤à¯à®²à¯à®²à®¿à®¯à®®à®¾à®• à®‡à®°à¯à®•à¯à®•à®¾à®¤à¯.