Atlas of IC technologies : an introduction to VLSI processes /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Menlo ; California :
Benjamin Cummings Pub. Co., /
1987.
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| Subjects: | |
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| Physical Description: | 330 p. ill. 24 cm. |
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| Bibliography: | Includes biliographical information and index. |
| ISBN: | 0805368507 |