The science and engineering of microelectronic fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
1996.
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| Series: | Oxford series in electrical engineering.
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| Subjects: | |
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|
3rd Floor Main Library
| Call Number: |
A1234.567 |
|---|---|
| Copy 1 | Available |