Fundamentals of semiconductor processing technology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston :
Kluwer Academic Publishers,
c1995.
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| Subjects: | |
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| Item Description: | Cover title: Fundamentals of semiconductor processing technologies. |
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| Physical Description: | xii, 599 p. : ill. ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0792395344 (acid-free paper) |