Kinetic theory of adsorption and desorption of gases on semiconductor surfaces progress report /
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| Main Author: | |
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| Corporate Author: | |
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| Format: | Electronic |
| Language: | English |
| Published: |
Ann Arbor :
University of Michigan, College of Engineering, Dept. of Chemical and Metallurgical Engineering,
[1963]
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| Series: | University of Michigan Technical Reports
UMR2448 |
| Subjects: | |
| Online Access: | http://hdl.handle.net/2027.42/6220 |
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Internet
http://hdl.handle.net/2027.42/62203rd Floor Main Library
| Call Number: |
A1234.567 |
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| Copy 1 | Available |