Design and modelling of silicon MEMS accelerometer
In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...
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| தலைமை எழà¯à®¤à¯à®¤à®¾à®³à®°à¯à®•à®³à¯: | , |
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| வடிவமà¯: | கடà¯à®Ÿà¯à®°à¯ˆ |
| மொழி: | English |
| வெளியீடபà¯à®ªà®Ÿà¯à®Ÿà®¤à¯: |
Inderscience Publishers
2013
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| பகà¯à®¤à®¿à®•à®³à¯: | |
| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•à®²à¯: | http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf |
| கà¯à®±à®¿à®¯à¯€à®Ÿà¯à®•à®³à¯: |
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