Simulation of a MEMS piezoelectric energy harvester
The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...
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| தலைமை எழà¯à®¤à¯à®¤à®¾à®³à®°à¯à®•à®³à¯: | , , |
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| வடிவமà¯: | Conference or Workshop Item |
| மொழி: | English |
| வெளியீடபà¯à®ªà®Ÿà¯à®Ÿà®¤à¯: |
2010
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| பகà¯à®¤à®¿à®•à®³à¯: | |
| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•à®²à¯: | http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/1/3707.pdf |
| கà¯à®±à®¿à®¯à¯€à®Ÿà¯à®•à®³à¯: |
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| தொகà¯à®ªà¯à®ªà¯: | The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions. |
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