High temperature post-deposition annealing studies of layer-by-layer (LBL) deposited hydrogenated amorphous silicon films
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications
2009
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| Subjects: | |
| Online Access: | http://repository.um.edu.my/5406/ http://repository.um.edu.my/5406/1/MRS.pdf |
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