Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering
This study mainly aims to evaluate the intermixing between layers during the deposition of dielectric/metal/dielectric nanoscale multilayer coatings. TiO(2) and WO(3) films as dielectric materials are developed using radio frequency reactive magnetron sputtering on unheated soda lime glass substrate...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/5557/ |
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