On Generation of Micro-Feature on Silicon with an Industrial Laser
Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:Y...
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Trans Tech Publications
2014
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| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•à®²à¯: | http://dx.doi.org/10.4028/www.scientific.net/MSF.773-774.661 http://dx.doi.org/10.4028/www.scientific.net/MSF.773-774.661 http://umpir.ump.edu.my/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf |
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