Comments: Virtual Laser-micromachining of MEMS Components

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Bibliographic Details
Main Authors:	M. F. F., Ab Rashid, M. R. M., Rejab, Mon, Daw T.T, Nurul Shahida, Shalahim, Mohd Fazli, Ismail
Format:	Article
Published:	Academy Publisher 2009
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://www.academypublisher.com/ijrte/vol01/no05/ijrte0105105109.pdf http://www.academypublisher.com/ijrte/vol01/no05/ijrte0105105109.pdf http://umpir.ump.edu.my/5418/1/Virtual_Laser-micromachining_of_MEMS_Components.PDF
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