Free-standing thick-film piezoelectric device
A free-standing thick-film cantilever sensor structure is presented. Such devices find use in applications such as vibration detection or energy harvesting. The structure was fabricated by screen printing layers of lead zirconate titanate between silver/palladium electrodes and cofiring the layers...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
IET
2008
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| Online Access: | http://digital-library.theiet.org/getabs/servlet/GetabsServlet?prog=normal&id=ELLEAK000044000004000280000001&idtype=cvips&gifs=yes&ref=no http://digital-library.theiet.org/getabs/servlet/GetabsServlet?prog=normal&id=ELLEAK000044000004000280000001&idtype=cvips&gifs=yes&ref=no http://eprints.utem.edu.my/4370/1/Free-standing_thick-film_piezoelectric_device.pdf |
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http://digital-library.theiet.org/getabs/servlet/GetabsServlet?prog=normal&id=ELLEAK000044000004000280000001&idtype=cvips&gifs=yes&ref=nohttp://digital-library.theiet.org/getabs/servlet/GetabsServlet?prog=normal&id=ELLEAK000044000004000280000001&idtype=cvips&gifs=yes&ref=no
http://eprints.utem.edu.my/4370/1/Free-standing_thick-film_piezoelectric_device.pdf