Temporal variations of radiative Ti, Ti* and Ar densities in pulsed-modulated rf magnetron sputtering plasmas
The temporal variations of the optical emission intensities of Ti, Ti*, and Ar were measured in pulse-modulated rf magnetron sputtering plasmas. The relationship between the production of Ti' and the radiative Ti, Ti*, and Ar densities in sputtering plasmas was discussed. We found that the inte...
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| Main Authors: | , , |
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| Format: | Article |
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| Online Access: | http://eprints.uthm.edu.my/2457/ http://eprints.uthm.edu.my/2457/1/Temporal_variations_of_radiative_Ti%2C_Ti_and_Ar.pdf |
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| Summary: | The temporal variations of the optical emission intensities of Ti, Ti*, and
Ar were measured in pulse-modulated rf magnetron sputtering plasmas. The
relationship between the production of Ti' and the radiative Ti, Ti*, and Ar densities
in sputtering plasmas was discussed. We found that the intensities of the Ti and Ar
lines dropped rapidly in the initial afterglow. However, in the late afterglow, the
intensities increased and had the second peaks. This result indicates the productions
of radiative Ti and Ar in the afterglow, attributing to recombination of TiC and Art
with electrons. On the other hand, we found no second peak in the intensity of the
Tit line in the afterglow plasma. |
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