Investigation of threshold voltage variations in NMOS

As MOSFET is rigorously scaled down to meet the expected circuit evolution according to the Moore’s Law, the issue of threshold voltage (VTH) becoming more dominant in transistor operation. This parameters is worth to be investigated since it dictates the performance of the transistor operation. On...

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Bibliographic Details
Main Authors: Musa, Rabiatul Adawiyah, Sanudin, Rahmat
Format: Conference or Workshop Item
Published: 2015
Subjects:
Online Access:http://eprints.uthm.edu.my/7154/
http://eprints.uthm.edu.my/7154/1/IC3E_2015_submission_024.pdf
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Summary:As MOSFET is rigorously scaled down to meet the expected circuit evolution according to the Moore’s Law, the issue of threshold voltage (VTH) becoming more dominant in transistor operation. This parameters is worth to be investigated since it dictates the performance of the transistor operation. On top of that, channel length modulation, which related to transistor scaling, plays dominant role in affecting the VTH. The investigation is performed primarily based on transistor modelling that relates the parameters of interest in device operation. It is carried out through simulation work of 45 nm n-type MOSFET (NMOS) in Sentaurus TCAD to see changes in transistor operation. Simulation results suggest that oxide thickness and dopant cocncentration in substrate have significant effect on the VTH. The changes in both parameters are related to changes in oxide layer capacitance and number of minority carriers that essentially affect the VTH.