Sticking probabilities of Cu, Zn, Sn, and S atoms in magnetron sputtering plasmas employing a Cu2ZnSnS4 stoichiometric target
Investigations on the density decays in the afterglow of pulsed magnetron sputtering plasmas employing a Cu2ZnSnS4 (CZTS) stoichiometric target were performed to evaluate the sticking probabilities of Cu, Zn, Sn and S atoms. The sticking probabilities were evaluated from the linear relationships bet...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Elsevier
2015
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| Online Access: | http://dx.doi.org/10.1016/j.vacuum.2015.07.019 http://dx.doi.org/10.1016/j.vacuum.2015.07.019 http://eprints.uthm.edu.my/7442/1/nafarizal_nayan_U.pdf |
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