Surface roughness and infra-red study of diamond-like carbon thin films
Diamond-like-carbon (DLC) thin films were prepared on silicon and glass substrates using direct current – plasma enhanced chemical vapour deposition (DC-PECVD) from a mixture of methane, hydrogen, and argon. Two sets of samples are successfully deposited with different substrate temperatures varied...
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| தலைமை எழà¯à®¤à¯à®¤à®¾à®³à®°à¯: | |
|---|---|
| வடிவமà¯: | Thesis |
| மொழி: | English |
| வெளியீடபà¯à®ªà®Ÿà¯à®Ÿà®¤à¯: |
2010
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| பகà¯à®¤à®¿à®•ளà¯: | |
| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•லà¯: | http://eprints.utm.my/16719/ http://eprints.utm.my/16719/7/BibiAishahRoslanMFSA2010.pdf |
| கà¯à®±à®¿à®¯à¯€à®Ÿà¯à®•ளà¯: |
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