Characterization technique of wet-chemical etch polymer for optical devices application
In this work, a wet-chemical etch polymer, BenzoCyclobutene (BCB 4024-40) is characterized using the method of prism coupling. This method is used to characterize the polymer refractive index, variation of film thickness with spin coating speed and average value of polymer loss. The information obta...
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| Main Authors: | , , , |
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| Format: | Book Section |
| Language: | English |
| Published: |
Penerbit UTM
2008
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| Subjects: | |
| Online Access: | http://eprints.utm.my/17056/ http://eprints.utm.my/17056/1/AbuBakarMohammad2008_CharacterizationTechniqueOfWet-Chemical.pdf |
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