The optical characterization of hydrogenated amorphous carbon thin films deposited by a DC-PECVD method
Diamond-like carbon (DLC) is a metastable form of amorphous carbon with attractive properties such as high hardness, low friction, chemical inertness and high wear resistance.
Saved in:
| Main Author: | |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2003
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/22262/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|