Vertically-tapered silicon nanowire arrays prepared by plasma enhanced chemical vapor deposition: synthesis, structural characterization and photoluminescence
Vertically aligned silicon nanowires (SiNWs) have been successfully synthesized using pure silane gas as a precursor by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of the growth temperature on the morphology, structure and photoluminescence properties...
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| Main Authors: | , , |
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| Format: | Article |
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Elsevier
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/63213/ http://eprints.utm.my/63213/ http://eprints.utm.my/63213/ |
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