Design and fabrication of a novel XYθz monolithic micro-positioning stage driven by NiTi shape-memory-alloy actuators
This paper reports a new shape-memory-alloy (SMA) micro-positioning stage. The device has been monolithically micro-machined with a single fabrication step. The design comprises a moving stage that is manipulated by six SMA planar springs actuators to generate movements with three degrees of freedom...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Institute of Physics Publishing
2016
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| Subjects: | |
| Online Access: | http://eprints.utm.my/72079/ http://eprints.utm.my/72079/ |
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