VHF-PECVD grown silicon nanoneedles: role of substrate temperature
Achieving highly aligned and dense silicon (Si) nanoneedles (NNs) is ever demanding for optoelectronics. We report the substrate temperature assisted Au-catalyzed SiNNs synthesis via very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) technique. The effects of varying substrate...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
Academic Press
2016
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/73784/ http://eprints.utm.my/73784/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!