Characterization of an inductively coupled plasma produced in argon at 13.56 MHz / Lim Ai Nuan
The electrical and plasma characteristics of radio frequency (13.56 MHz) inductively coupled argon plasma (RF ICP) were studied in this project. On the electrical breakdown properties, the breakdown voltage has a general appearance of Paschen’s curve and the minimum is achieved at 0.1 mbar. After ig...
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| Format: | Thesis |
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2010
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| Online Access: | http://pendeta.um.edu.my/client/default/search/detailnonmodal/ent:$002f$002fSD_ILS$002f796$002fSD_ILS:796605/one?qu=Characterization+of+an+inductively+coupled+plasma+produced http://pendeta.um.edu.my/client/default/search/detailnonmodal/ent:$002f$002fSD_ILS$002f796$002fSD_ILS:796605/one?qu=Characterization+of+an+inductively+coupled+plasma+produced http://studentsrepo.um.edu.my/4309/1/Dissertation_of_Lim_Ai_Nuan_(MSc_2010).pdf |
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Internet
http://pendeta.um.edu.my/client/default/search/detailnonmodal/ent:$002f$002fSD_ILS$002f796$002fSD_ILS:796605/one?qu=Characterization+of+an+inductively+coupled+plasma+producedhttp://pendeta.um.edu.my/client/default/search/detailnonmodal/ent:$002f$002fSD_ILS$002f796$002fSD_ILS:796605/one?qu=Characterization+of+an+inductively+coupled+plasma+produced
http://studentsrepo.um.edu.my/4309/1/Dissertation_of_Lim_Ai_Nuan_(MSc_2010).pdf