A problem-based learning approach in teaching mask design for mosfet fabrication
Problem-based learning (PBL) has been introduced at Universiti Tun Hussein Onn Malaysia (UTHM) for almost two years as a new innovative teaching method for engineering education. This paper highlights an alternative way of teaching mask design for MOSFET fabrication using PBL approach as a student c...
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| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/1845/ http://eprints.uthm.edu.my/1845/1/A_PROBLEM_BASED_LEARNING_APPROACH_IN_TEACHING_MUHAMMAD_SUHAIMI_SULONG_2007.pdf |
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| Summary: | Problem-based learning (PBL) has been introduced at Universiti Tun Hussein Onn Malaysia (UTHM) for almost
two years as a new innovative teaching method for engineering education. This paper highlights an alternative
way of teaching mask design for MOSFET fabrication using PBL approach as a student centered-learning
approach. The learning process has been successful using the Facts-Ideas-Learning Issues-Action Plans (FILA)
chart as a PBL technique. Four groups of students have been assigned a project topic which meets the curriculum
objectives and have industrial relevance. In this project, the students work independently; learning new
Computer Aided Design (CAD) tools to create their own mask design using contact printing method. It is said to
be a cost effective and simple technique for mask design. The students also have the opportunity to be involved
"hands-on" in fabrication process of MOSFET (Metal-Oxide-Semiconductor Field Effect Transistor) where they
perform the photolithography technique in order to transfer the pattern from the masks onto the wafer and hence
complete the fabrication process. The fabrication process was done in UTHM Microelectronics Cleanroom. In
addition, the students also prepare the presentation and the documentation of the project. The paper concludes by
discussing the benefits and advantages to the students after completing the project. |
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