Measurement of plasma parameters in Ar/O2 magnetron sputtering Zn plasma using Langmuir probe
Reactive sputtering technique using Zn metal target represents one of the simplest and most effective technique which has been used by many researchers. In the present work, we investigate the properties of reactive magnetron sputtering plasma using Zn target. The magnetron sputtering plasmas were p...
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| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/2015/ http://eprints.uthm.edu.my/2015/1/Nafarizal_FKEE_(ISPC2011).pdf |
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