Design, simulation and characterization of 50nm p-well MOSFET using Sentaurus TCAD Software

Device 50nm p-well MOSFET was designed, developed and optimized based on 90nm recipe using Sentaurus TCAD Software. In this project, there are two sub-programs used which are Sentaurus Process and Sentaurus Device. Sentaurus Process is a simulation process which in designing the semiconductor techno...

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Bibliographic Details
Main Authors: Morsin, Marlia, Amriey, Mohd Khairul, Zulkipli, Abdul Majeed, Sanudin, Rahmat
Format: Conference or Workshop Item
Published: 2009
Subjects:
Online Access:http://eprints.uthm.edu.my/413/
http://eprints.uthm.edu.my/413/1/25_full_marlia.pdf
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