Cost effective mask design in CMOS transistor fabrication for undergraduates program
This paper presents a new innovative way of teaching undergraduate program using low cost masks. In MOSFET fabrication, the cost to produce a complete mask set for pattern transfer process extremely high and not cost effective for undergraduates program. The purpose of these masks is to define certa...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
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| Online Access: | http://eprints.uthm.edu.my/6792/ http://eprints.uthm.edu.my/6792/1/MARLIA_MORSIN_cost_effective.pdf |
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