Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The characterist...
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| Format: | Thesis |
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2004
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| Online Access: | http://eprints.uthm.edu.my/1531/ http://eprints.uthm.edu.my/1531/1/24_Pages_from_FABRICATION%2C_CHARACTERIZATION_AND_OPTIMIZATION_IN%2DHOUSE_MOSFET_TRANSISTOR_USING_SPIN.pdf |
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