Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The characterist...
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| தலைமை எழà¯à®¤à¯à®¤à®¾à®³à®°à¯: | |
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| வடிவமà¯: | Thesis |
| வெளியீடபà¯à®ªà®Ÿà¯à®Ÿà®¤à¯: |
2004
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| பகà¯à®¤à®¿à®•ளà¯: | |
| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•லà¯: | http://eprints.uthm.edu.my/1531/ http://eprints.uthm.edu.my/1531/1/24_Pages_from_FABRICATION%2C_CHARACTERIZATION_AND_OPTIMIZATION_IN%2DHOUSE_MOSFET_TRANSISTOR_USING_SPIN.pdf |
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