ZrO2 thin films on Si substrate
In the advancement of metal–oxide–semiconductor technology, Si-based semiconductor, with SiO2 as outstanding dielectric, has been dominating microelectronic industry for decades. However, the drastic down-scaling in ultra-large-scale integrated circuitry has made ultrathin SiO2 (~1.2 nm) unacceptabl...
à®®à¯à®´à¯ விளகà¯à®•à®®à¯
Saved in:
| தலைமை எழà¯à®¤à¯à®¤à®¾à®³à®°à¯à®•ளà¯: | , |
|---|---|
| வடிவமà¯: | கடà¯à®Ÿà¯à®°à¯ˆ |
| வெளியீடபà¯à®ªà®Ÿà¯à®Ÿà®¤à¯: |
Kluwer (now part of Springer)
2010
|
| பகà¯à®¤à®¿à®•ளà¯: | |
| நிகழà¯à®¨à®¿à®²à¯ˆ அணà¯à®•லà¯: | http://link.springer.com/article/10.1007%2Fs10854-010-0144-5 http://link.springer.com/article/10.1007%2Fs10854-010-0144-5 |
| கà¯à®±à®¿à®¯à¯€à®Ÿà¯à®•ளà¯: |
கà¯à®±à®¿à®šà¯à®šà¯Šà®²à¯ இணை
கà¯à®±à®¿à®¯à¯€à®Ÿà¯à®•ள௠இலà¯à®²à¯ˆ, இநà¯à®¤ கà¯à®±à®¿à®šà¯à®šà¯Šà®²à¯à®²à¯ˆ à®®à¯à®¤à®²à®¿à®²à¯ பதிவ௠செயà¯à®¯à¯à®™à¯à®•ளà¯!
|