Synthesis and annealing of nanostructured TiO2 films by radio-frequency magnetron sputtering
In this investigation, anatase TiO2 thin films were deposited on glass substrates at room temperature by RF magnetron sputtering at an elevated sputtering pressure of 3 Pa. The TiO2 films deposited at room temperature were annealed at different temperatures up to 873°K for 1 h. The TiO2 films were...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Journal of Applied Sciences
2009
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| Subjects: | |
| Online Access: | http://www.doaj.org/doaj?func=abstract&id=604916 http://www.doaj.org/doaj?func=abstract&id=604916 |
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