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Optimization of HALO structure effects in 45nm p-type MOSFETs device using Taguchi Method

In this study, the Taguchi method was used to optimize the effect of HALO structure or halo implant variations on threshold voltage (VTH) and leakage current (ILeak) in 45nm p-type Metal Oxide Semiconductor Field Effect Transistors (MOSFETs) device. Besides halo implant dose, the other process p...

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Bibliographic Details
Main Authors: Fauziyah, Salehuddin, Ahmad, Ibrahim, Azlee Hamid, Fazrena, Zaharim, Azami, Elgomati, H. A., Yeop Majlis, Burhanuddin, Apte, P. R.
Format: Article
Published: 2011
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://www.waset.org/journals/ijeas/
http://www.waset.org/journals/ijeas/
http://eprints.utem.edu.my/4194/1/%28J5%29_JEAS_7%282%29_80-86_zie.pdf
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http://www.waset.org/journals/ijeas/
http://www.waset.org/journals/ijeas/
http://eprints.utem.edu.my/4194/1/%28J5%29_JEAS_7%282%29_80-86_zie.pdf

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