The atomic force microscope study of self-assembled silicon nanodots growth using magnetron sputtering system
In this paper self-assembled silicon nanodots have been grown on silicon substrate using radio-frequency magnetron sputtering system. This system were settled at varying experimental conditions such as substrate temperature, time of deposition, RF power and fixed argon flow rate. Then the surface ro...
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| Pengarang-pengarang Utama: | , , |
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| Format: | Conference or Workshop Item |
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2013
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| Subjek-subjek: | |
| Capaian Atas Talian: | http://eprints.utm.my/51345/ http://eprints.utm.my/51345/ |
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